Particle Standards for Calibration & Metrology
Particle standards provide known, controlled size references for instrument calibration, inspection verification and particle-metrology workflows.
PSL and silica standards
Polystyrene latex (PSL) microspheres are widely used as size references because they can be produced with narrow particle-size distributions. Silica standards provide an inorganic alternative used in applications where optical response, material behavior or process conditions call for a different particle material.
Common application paths
- Particle counter and sizing instrument calibration
- Wafer inspection system calibration
- Calibration wafer and contamination wafer preparation
- Semiconductor contamination metrology
- Research and method-development work
Choose the format around the instrument
The correct buying decision is not simply “PSL versus silica.” It also depends on whether the instrument expects a suspension, aerosolized reference, deposited wafer standard or another presentation method. GSE can route the request based on instrument and application.
View Particle Size Standards or Calibration Wafer Standards.
Particle material is only one part of the specification
Material
PSL is commonly used as a uniform spherical reference. Silica is selected when an inorganic particle or different optical/material behavior is required.
Nominal size
Specify the target diameter and any tolerance or multi-size requirement tied to the instrument procedure.
Presentation
Suspension, powder or deposition format changes how the standard is introduced and observed.
Documentation
State certificate, traceability, concentration or characterization information required for acceptance.
Why particle-standard RFQs stall
The instrument is omitted
The same nominal size can be used in different workflows. Without the instrument model and sample method, the supplier cannot reliably resolve presentation or compatibility.
“NIST traceable” is treated as a complete specification
Traceability language does not define material, size, concentration, substrate, deposition pattern or certificate content. Those fields still have to be specified.
Wafer deposition and suspension are mixed together
Particles deposited onto a wafer support surface-inspection calibration. Particle suspensions support other counters and sizing instruments. The purchasing route must match the procedure.
Storage and use conditions are ignored
Ask for handling, storage and shelf-life information relevant to the quoted format. Do not import assumptions from a different particle material or presentation.
Buying and specification questions
Answers are intentionally scoped to the purchasing decision. Final engineering details, configuration, price and lead time are confirmed in the quotation and manufacturer documentation.
What is the difference between PSL and silica particle standards?
PSL is commonly selected as a uniform polymer sphere reference. Silica is an inorganic particle option. The correct choice depends on the instrument, test method and material response required.
Can particles be supplied on a wafer?
Yes, for selected semiconductor surface-inspection workflows. Use the Calibration Wafer Standards page and specify wafer format, particle size, material and deposition pattern.
What does GSE need to quote a particle standard?
Instrument model, nominal size, material, presentation format, quantity, required documentation and destination.
Are current concentration and packaging options guaranteed by the website?
No. Available format, packaging and documentation are confirmed for the requested product in the quotation.
Specify the assigned value, method and documentation—not only nominal size
Particle material, distribution, uncertainty, handling and instrument method control fitness for use.
Specify more than nominal size
Build the particle-standard request from material, matrix, method, assigned value, uncertainty, concentration and certificate requirements.
Particle standards comparison
Compare assigned values, matrix, uncertainty, concentration and certificate scope.
Standards and counters belong in one calibration workflow
Particle-standard selection should account for the target counter, size channels, measurement method and calibration evidence.